TY - JOUR
T1 - Effect of chlorine on the photoluminescence spectra of hydrogenated and chlorinated amorphous silicon prepared by glow discharge
AU - Al-Dallal, Shawqi
AU - Chevallier, J.
AU - Kalem, S.
AU - Bourneix, J.
PY - 1983/12
Y1 - 1983/12
N2 - Chlorinated and hydrogenated amorphous silicon films were prepared by glow discharge at various R.F. power. The photoluminescence spectra were measured as a function of temperature and plasma power. The temperature dependence of the integrated intensity of the luminescence band exhibits a feature in the 67-77°K temperature range. Using the luminescence, infrared, conductivity and compositional data we have ascribed this feature to a chlorine induced density of states in the band gap. Increasing the chlorine concentration in the sample results in a shift of the PL peak position (Ep) to higher energies and a broadening of the spectrum. Based on the band gap fluctuation model, and using the optical absorption data, we explained the Ep behaviour in terms of a redistribution of zero phonon transitions and a contribution, of compositional origin, from a change in the band gap energy.
AB - Chlorinated and hydrogenated amorphous silicon films were prepared by glow discharge at various R.F. power. The photoluminescence spectra were measured as a function of temperature and plasma power. The temperature dependence of the integrated intensity of the luminescence band exhibits a feature in the 67-77°K temperature range. Using the luminescence, infrared, conductivity and compositional data we have ascribed this feature to a chlorine induced density of states in the band gap. Increasing the chlorine concentration in the sample results in a shift of the PL peak position (Ep) to higher energies and a broadening of the spectrum. Based on the band gap fluctuation model, and using the optical absorption data, we explained the Ep behaviour in terms of a redistribution of zero phonon transitions and a contribution, of compositional origin, from a change in the band gap energy.
UR - http://www.scopus.com/inward/record.url?scp=0020940284&partnerID=8YFLogxK
U2 - 10.1016/0022-3093(83)90595-1
DO - 10.1016/0022-3093(83)90595-1
M3 - Article
AN - SCOPUS:0020940284
SN - 0022-3093
VL - 59-60
SP - 361
EP - 364
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
IS - PART 1
ER -