Ellipsometry studies of Si/Ge superlattices with embedded Ge dots

Şeref Kalem, Örjan Arthursson, Peter Werner

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, we present an analysis for treating the spectroscopic ellipsometry response of Si/Ge superlattices (SLs) with embedded Ge dots. Spectroscopic ellipsometry (SE) measurement at room temperature was used to investigate optical and electronic properties of Si/Ge SLs which were grown on silicon (Si) wafers having âŒ

Original languageEnglish
Pages (from-to)555-559
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Volume112
Issue number3
DOIs
Publication statusPublished - Sept 2013
Externally publishedYes

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