Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon

S. Kalem, R. Mostefaoui, J. Bourneix, J. Chevallier

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

The evolution is presented of infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films versus the chlorine concentration and the annealing temperature. As the chlorine content increases, an increase of the 2100 cm-1 band intensity is observed. We associate this effect with the existence of SiHxCly, mixed configurations. The SiCl stretching band, located at 545 cm-1 in unannealed samples, shifts continuously up to 590cm-1 as the annealing temperature increases. This displacement is attributed to a predominance of SiCl2 species around 500°C and their transformation to SiCl3 species and SiCl4 molecules above 700°C.

Original languageEnglish
Pages (from-to)509-519
Number of pages11
JournalPhilosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
Volume53
Issue number6
DOIs
Publication statusPublished - Jun 1986
Externally publishedYes

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