TY - JOUR
T1 - Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon
AU - Kalem, S.
AU - Mostefaoui, R.
AU - Bourneix, J.
AU - Chevallier, J.
PY - 1986/6
Y1 - 1986/6
N2 - The evolution is presented of infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films versus the chlorine concentration and the annealing temperature. As the chlorine content increases, an increase of the 2100 cm-1 band intensity is observed. We associate this effect with the existence of SiHxCly, mixed configurations. The SiCl stretching band, located at 545 cm-1 in unannealed samples, shifts continuously up to 590cm-1 as the annealing temperature increases. This displacement is attributed to a predominance of SiCl2 species around 500°C and their transformation to SiCl3 species and SiCl4 molecules above 700°C.
AB - The evolution is presented of infrared transmission spectra of hydrogenated and chlorinated amorphous silicon films versus the chlorine concentration and the annealing temperature. As the chlorine content increases, an increase of the 2100 cm-1 band intensity is observed. We associate this effect with the existence of SiHxCly, mixed configurations. The SiCl stretching band, located at 545 cm-1 in unannealed samples, shifts continuously up to 590cm-1 as the annealing temperature increases. This displacement is attributed to a predominance of SiCl2 species around 500°C and their transformation to SiCl3 species and SiCl4 molecules above 700°C.
UR - http://www.scopus.com/inward/record.url?scp=0022736238&partnerID=8YFLogxK
U2 - 10.1080/13642818608240664
DO - 10.1080/13642818608240664
M3 - Article
AN - SCOPUS:0022736238
SN - 1364-2812
VL - 53
SP - 509
EP - 519
JO - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
JF - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
IS - 6
ER -