Optical and electrical properties of chlorinated and hydrogenated amorphous silicon prepared by glow discharge

J. Chevallier, S. Kalem, S. Al Dallal, J. Bourneix

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28 Citations (Scopus)

Abstract

Chlorinated and hydrogenated amorphous silicon films were prepared by glow discharge of a SiCl4/H2 mixture. Infrared spectra of these films show that, in addition to the hydrogen induced bands, two new modes appear at 545 cm-1 (SiCl stretching) and 500 cm-1 (Si TO modes induced by chlorine). Observation of the 545 cm-1 band proves that chlorine is able to act as a dangling bond terminator in an amorphous silicon matrix. A good agreement is found between the total amount of chlorine determined by electron microprobe analysis and the value estimated from the integrated strength of the SiCl stretching mode. The relatively high value of the optical band gap (1.80 eV) of our material containing only 5 at.% bonded hydrogen shows that chlorine plays a major role in the optical gap value. Electrical conductivity, photoconductivity and luminescence properties are qualitatively similar to that of a: SiH films.

Original languageEnglish
Pages (from-to)277-290
Number of pages14
JournalJournal of Non-Crystalline Solids
Volume51
Issue number3
DOIs
Publication statusPublished - Nov 1982
Externally publishedYes

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