Structural properties of Ge-Sb-Te alloys

Hatun Cinkaya, Adil Ozturk, Arif Sirri Atilla Hasekioğlu, Zahit Evren Kaya, Seref Kalem, Christelle Charpin-Nicolle, Guillaume Bourgeois, Nicolas Guillaume, Marie Claire.Cyrille, Julien Garrione, Gabriele Navarro, Etienne Nowak

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

In this work, we have investigated the structural properties of Germanium (Ge)-Antimony (Sb)-Tellurium (Te) (GST) and Ge-rich GST thin film samples. The structural properties of the films are studied after annealing temperatures from room temperature to 450 °C. We performed the annealing procedure using a heat rate of 10 °C/min to achieve the target temperature for a duration of 10 min under N2 flow. After heat treatment, we carried out X-Ray Diffraction (XRD), Fourier Infra-Red Spectroscopy (FTIR), Raman Spectroscopy and Scanning Electron Microscopy (SEM) equipped with Energy-dispersive X-ray spectroscopy (EDS) to investigate the evolution of the structure in the samples.

Original languageEnglish
Article number108101
JournalSolid-State Electronics
Volume185
DOIs
Publication statusPublished - Nov 2021
Externally publishedYes

Keywords

  • GST
  • Ge-rich GST
  • Phase change materials
  • Thermal annealing

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